Vacuum Load Lock Door

Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve.

Vacuum load lock door.

Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve. They are designed for base pressures between 1x10 7 mbar and 1x10 9 mbar. Ln 2 cooling or heating samples up to 600 c. For conversion tables click here.

Doors are hinged and fitted with a swingaway hand knob locking mechanism. 1x10 10 torr temperature range 20ºc to 150ºc magnets must be removed for 150ºc rating. Description quick access doors provide convenient and fast manual loading of samples in and out of vacuum chambers. The top port of the load lock chamber mechanism is usually sealed by a viton gasket.

See quick access doors section vacuum range. Home motion manipulation manipulation load lock systems bolt kits for quick access doors with clearance holes. Doors are hinged and fitted with a swingaway hand knob locking mechanism. Offered in a wide range of uhv flange sizes with or without viewport glass.

Load lock chambers are provided with a six inch cf flange for mounting to the gate valve a six inch add a door with 7056 glass viewport a 2 75 inch cf flange for attachment of the linear feedthrough and two 2 75 inch cf flanges for pumping. 022 transfer valve monovat direct for load lock and process chamber isolation in semiconductor production systems for 200 300 and 450 mm wafers. A range of options exist for e g. All access doors are supplied with viton elastomer seals suitable for high vacuum service.

For complete instructions and parts needed to fix your door locks and other related vacuum problems go here. Precision hinged access doors seal with a fluorocarbon o ring. Bolt kits for quick access doors with clearance holes. The chambers are equipped with uhv connecting flanges and additional ports for future versatility.

Mdc vacuum products llc is an iso 9001 2015 certified company. For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers. 30ºc maximum when attached.